Teaching plan for the course unit

 

 

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General information

 

Course unit name: Microtechnology and Nanotechnology

Course unit code: 360611

Academic year: 2021-2022

Coordinator: Enric Bertran Serra

Department: Department of Applied Physics

Credits: 6

Single program: S

 

 

Estimated learning time

Total number of hours 150

 

Face-to-face and/or online activities

63

 

-  Lecture

Face-to-face

 

45

 

-  Lecture with practical component

Face-to-face

 

12

 

-  Laboratory session

Face-to-face

 

6

Independent learning

87

 

 

Recommendations

 

The contents of the subject Microtechnology and Nanotechnology have been designed so as to take as starting point of the course the knowledge acquired in the compulsory subjects of the first seven semesters of the bachelor’s degree in Physics.

There is no academic requirement.

 

 

Competences to be gained during study

 

   -

Research skills: obtain, use and analyze scientific and technical reference works and any other source of information relevant to research tasks.

   -

General understanding of physical concepts: be familiar with the most important fields in the wider discipline of physics.

Learning objectives

 

Referring to knowledge

This subject runs cross-disciplinarily through physics, but also chemistry and biology. The subject is focused on the description of systems where several physical phenomena converge. The objectives are that students apply their basic knowledge to the specific phenomenology of dimension systems that range from micrometric to nanometric scales. This objective includes learning nanomanipulation techniques and nanodevice development techniques, and also to the study of growth processes where, starting at the atomic level, microstructured and nanostructured materials are found. The objectives also include learning to present the main characterisation techniques for these scales and their applications.

The teaching objectives are completed with different laboratory sessions that illustrate the contents of the subject.

 

 

Teaching blocks

 

1. Introduction to micro- and nanotechnology

1.1. Introduction; What are microtechnology and nanotechnology?

1.2. General overview of characterisation and manipulation techniques

1.3. Impact on new materials and devices, and their characteristics and applications

2. Micro- and nanostructured materials

2.1. Micro- and nanostructured materials

2.2. Types of structured materials

2.3. Micro- and nanometric measurement systems

2.4. Quantum confinement

3. Physical characterisation techniques for micro- and nanostructured materials

3.1. Determination of the physical characteristics of micro- and nanostructured materials: electrical and magnetic

3.2. Synchrotron-based techniques

4. Growth processes

4.1. Nucleation theory; Processes in gas phase and in plasmas; Surface processes

4.2. Growth of particles and thin films

4.3. Physical and chemical techniques of formation

5. Optical characterisation techniques

5.1. Spectroscopic techniques

5.2. Reflection, absorption, transmission

5.3. FTIR and Raman

5.4. Ellipsometry

6. Surface analysis: composition

6.1. Compositional analysis; Electronic structure

6.2. Electronic spectroscopies (UPS, Auger, ESCA)

6.3. SIMS

7. Structural and morphological characterisation techniques

7.1. Structural and morphological characterisation

7.2. Transmission (TEM) and scanning (SEM) electron microscopy

7.3. Ionic microscopy (FIB)

7.4. Interferometric microscopy

8. Micro- and nanometric manufacturing techniques

8.1. Micro- and nanometric devices

8.2. Lithographs: manufacture base

8.3. Combination with deposit and attack techniques

8.4. Microelectronic manufacture processes

9. Applications in microelectronics and nanoelectronics

9.1. From micro to nano: non-quantum consequences of dimension reductions

9.2. Sensors and actuators: manufacture and characteristics

10. Laboratory

10.1. Experiment 1. Study of different types of nanostructures through AFM-based techniques

10.2. Experiment 2. Production of planar resistance with high vacuum PVD and its characterisation

10.3. Experiment 3. Optical lithography

 

 

Teaching methods and general organization

 

Theory sessions consist of the presentation of theoretical and descriptive contents of the subject. The theory with a practical component sessions consist of the presentation and resolution of examples and problems. Students contribute and participate in the sessions independently solving the problems before the lecturer does. The laboratory experiments are conducted in the Clean Room laboratory, in different laboratories of the Faculty of Physics and at the Science and Technology Centres of the UB, which are equipped with the required facilities for microtechnology and nanotechnology processes. Students write a report on each experiment, which they must deliver to the lecturer on the week after it has been completed.

If special measures are required in response to COVID-19, lectures shall be carried out in accordance with the University of Barcelona’s current regulations. Experiments shall be carried out individually or in pairs but with suitable protection (face mask, face screen, gloves, etc.), in accordance with the University of Barcelona’s current regulations.

Topics 7, 8 and 9 are taught entirely in English.

 

 

Official assessment of learning outcomes

 

Students sit three mid-term written examinations. Students are assessed on the basis of class participation and submission of exercises and/or assignments, as well as on the laboratory reports. A final comprehensive examination is scheduled.

The examinations cover the contents of theoretical and theoretical with a practical component sessions and of the laboratory work. The final grade is calculated as the weighted average of the marks awarded for each of the three examinations (45%), the mark for laboratory work (10%) and the final global examination (45%). The final grade is calculated as 90% for the global examination and 10% for the laboratory in case the result is higher than the average of the three mid-term examinations.

In order to be eligible to pass the subject, the laboratory practice must have been passed. Therefore, attendance to all laboratory sessions and submission of the corresponding reports is expected on the dates established.

The final grade for the repeat assessment is calculated as the weighted average of the marks awarded for a written examination (90%) and the mark for the laboratory sessions (10%).

The grade for the specific competences is the one obtained as final grade of the learning outcomes of the subject.

If special measures are required in response to COVID-19, the examinations shall be carried out in accordance with the University of Barcelona’s current regulations.

 

Examination-based assessment

The final grade is calculated as the weighted average of the marks awarded for the final examination (90%) and for laboratory work (10%).

In order to be eligible to pass the subject, the laboratory practice must have been passed. Therefore, attendance to all laboratory sessions and submission of the corresponding reports is expected on the dates established.

The final grade for the repeat assessment is calculated as the weighted average of the marks awarded for a written examination (90%) and the mark for the laboratory sessions (10%).